@conference{
author = "Randjelović, Danijela and Jovanov, Vladislav and Lazić, Žarko and Đurić, Zoran G. and Matic, A.",
year = "2008",
abstract = "This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
journal = "26th International Conference on Microelectronics, Vols 1 and 2, Proceedings",
title = "Vacuum MEMS sensor based on thermopiles - Simple model and experimental results",
pages = "367-370",
doi = "10.1109/ICMEL.2008.4559298"
}