Intelligent thermopile-based vacuum sensor
2011
Authors
Randjelović, DanijelaFrantlović, Miloš
Miljkovic, B.
Rosandic, B.
Jakšić, Zoran
Popović, Bogdan
Conference object (Published version)
Metadata
Show full item recordAbstract
We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.
Keywords:
vacuum sensor / intelligent sensor / thermopile / pressure measurementSource:
Eurosensors Xxv, 2011, 25Publisher:
- Elsevier
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
- Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
DOI: 10.1016/j.proeng.2011.12.143
ISSN: 1877-7058
WoS: 000300512400140
Scopus: 2-s2.0-84857184202
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IHTMTY - CONF AU - Randjelović, Danijela AU - Frantlović, Miloš AU - Miljkovic, B. AU - Rosandic, B. AU - Jakšić, Zoran AU - Popović, Bogdan PY - 2011 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/832 AB - We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors. PB - Elsevier C3 - Eurosensors Xxv T1 - Intelligent thermopile-based vacuum sensor VL - 25 DO - 10.1016/j.proeng.2011.12.143 ER -
@conference{ author = "Randjelović, Danijela and Frantlović, Miloš and Miljkovic, B. and Rosandic, B. and Jakšić, Zoran and Popović, Bogdan", year = "2011", abstract = "We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.", publisher = "Elsevier", journal = "Eurosensors Xxv", title = "Intelligent thermopile-based vacuum sensor", volume = "25", doi = "10.1016/j.proeng.2011.12.143" }
Randjelović, D., Frantlović, M., Miljkovic, B., Rosandic, B., Jakšić, Z.,& Popović, B.. (2011). Intelligent thermopile-based vacuum sensor. in Eurosensors Xxv Elsevier., 25. https://doi.org/10.1016/j.proeng.2011.12.143
Randjelović D, Frantlović M, Miljkovic B, Rosandic B, Jakšić Z, Popović B. Intelligent thermopile-based vacuum sensor. in Eurosensors Xxv. 2011;25. doi:10.1016/j.proeng.2011.12.143 .
Randjelović, Danijela, Frantlović, Miloš, Miljkovic, B., Rosandic, B., Jakšić, Zoran, Popović, Bogdan, "Intelligent thermopile-based vacuum sensor" in Eurosensors Xxv, 25 (2011), https://doi.org/10.1016/j.proeng.2011.12.143 . .