Microselectromechanical system (MEMS) based microfluidic platforms
Authors
Vasiljević-Radović, DanaRašljić, Milena
Smiljanić, Milče M.
Lazić, Žarko
Radulović, Katarina
Cvetanović-Zobenica, Katarina
Conference object (Published version)
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Show full item recordAbstract
In this work an overview of Micro Electromechanical
Systems (MEMS)-based microfluidic platforms for
different applications is presented. Microfluidics refers
to a set of technologies that control the flow of liquids or
gases through miniaturized systems in typical amounts of
nano- and pico- liters. Microfluidic devices are
characterized by microchannels with characteristic
dimensions in the micrometer range. The main
techniques, technologies and materials used for
fabrication of MEMS microfluidic devices and systems
are presented. The used materials and their properties are
very important for the final characteristics and
functionalities of devices. As an example, the design and
fabrication of our opto-fluidic lab-on-a-chip device based
on silicon and pyrex glass is given.
Keywords:
MEMS / microfluidicsSource:
Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia, 2019, 570-570Publisher:
- Belgrade : ETRAN Society / Beograd : Društvo za ETRAN
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-MESTD-Technological Development (TD or TR)-32008)
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Institution/Community
IHTMTY - CONF AU - Vasiljević-Radović, Dana AU - Rašljić, Milena AU - Smiljanić, Milče M. AU - Lazić, Žarko AU - Radulović, Katarina AU - Cvetanović-Zobenica, Katarina PY - 2019 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/7420 AB - In this work an overview of Micro Electromechanical Systems (MEMS)-based microfluidic platforms for different applications is presented. Microfluidics refers to a set of technologies that control the flow of liquids or gases through miniaturized systems in typical amounts of nano- and pico- liters. Microfluidic devices are characterized by microchannels with characteristic dimensions in the micrometer range. The main techniques, technologies and materials used for fabrication of MEMS microfluidic devices and systems are presented. The used materials and their properties are very important for the final characteristics and functionalities of devices. As an example, the design and fabrication of our opto-fluidic lab-on-a-chip device based on silicon and pyrex glass is given. PB - Belgrade : ETRAN Society / Beograd : Društvo za ETRAN C3 - Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia T1 - Microselectromechanical system (MEMS) based microfluidic platforms SP - 570 EP - 570 UR - https://hdl.handle.net/21.15107/rcub_cer_7420 ER -
@conference{ author = "Vasiljević-Radović, Dana and Rašljić, Milena and Smiljanić, Milče M. and Lazić, Žarko and Radulović, Katarina and Cvetanović-Zobenica, Katarina", year = "2019", abstract = "In this work an overview of Micro Electromechanical Systems (MEMS)-based microfluidic platforms for different applications is presented. Microfluidics refers to a set of technologies that control the flow of liquids or gases through miniaturized systems in typical amounts of nano- and pico- liters. Microfluidic devices are characterized by microchannels with characteristic dimensions in the micrometer range. The main techniques, technologies and materials used for fabrication of MEMS microfluidic devices and systems are presented. The used materials and their properties are very important for the final characteristics and functionalities of devices. As an example, the design and fabrication of our opto-fluidic lab-on-a-chip device based on silicon and pyrex glass is given.", publisher = "Belgrade : ETRAN Society / Beograd : Društvo za ETRAN", journal = "Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia", title = "Microselectromechanical system (MEMS) based microfluidic platforms", pages = "570-570", url = "https://hdl.handle.net/21.15107/rcub_cer_7420" }
Vasiljević-Radović, D., Rašljić, M., Smiljanić, M. M., Lazić, Ž., Radulović, K.,& Cvetanović-Zobenica, K.. (2019). Microselectromechanical system (MEMS) based microfluidic platforms. in Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia Belgrade : ETRAN Society / Beograd : Društvo za ETRAN., 570-570. https://hdl.handle.net/21.15107/rcub_cer_7420
Vasiljević-Radović D, Rašljić M, Smiljanić MM, Lazić Ž, Radulović K, Cvetanović-Zobenica K. Microselectromechanical system (MEMS) based microfluidic platforms. in Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia. 2019;:570-570. https://hdl.handle.net/21.15107/rcub_cer_7420 .
Vasiljević-Radović, Dana, Rašljić, Milena, Smiljanić, Milče M., Lazić, Žarko, Radulović, Katarina, Cvetanović-Zobenica, Katarina, "Microselectromechanical system (MEMS) based microfluidic platforms" in Proceedings of papers - (Ic) ETRAN 6th International Conference on Electrical, Electronical and Computing Engineering, June 03-06 2019, Silver Lake, Serbia (2019):570-570, https://hdl.handle.net/21.15107/rcub_cer_7420 .