Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption
Samo za registrovane korisnike
2010
Članak u časopisu (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor.
Ključne reči:
Multilayer adsorption / Adsorption-desorption noise / MEMS/NEMS sensors / MEMS/NEMS resonant structuresIzvor:
Microelectronic Engineering, 2010, 87, 5-8, 1181-1184Izdavač:
- Elsevier
Finansiranje / projekti:
- Reinforcement of Regional Microsystems and Nanosystems Centre (EU-FP7-205533)
DOI: 10.1016/j.mee.2009.12.039
ISSN: 0167-9317
WoS: 000276300700124
Scopus: 2-s2.0-77049097119
Institucija/grupa
IHTMTY - JOUR AU - Đurić, Zoran G. AU - Jokić, Ivana AU - Djukic, Maja M. AU - Frantlović, Miloš PY - 2010 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/733 AB - This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor. PB - Elsevier T2 - Microelectronic Engineering T1 - Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption VL - 87 IS - 5-8 SP - 1181 EP - 1184 DO - 10.1016/j.mee.2009.12.039 ER -
@article{ author = "Đurić, Zoran G. and Jokić, Ivana and Djukic, Maja M. and Frantlović, Miloš", year = "2010", abstract = "This paper presents the analysis of fluctuations of both the number and the mass of particles adsorbed on the surface of MEMS/NEMS structures, as well as the fluctuations of the micro/nanostructure resonant frequency, in the case of adsorption in the arbitrary number of layers. The presented theory shows that the fluctuations, calculated assuming multilayer adsorption, are higher than those obtained by using a monolayer (Langmuir) model. Since the multilayer adsorption is more realistic case than the monolayer adsorption, this theory enables a more accurate estimation of both AD noise and the minimal detectable signal of a MEMS/NEMS sensor.", publisher = "Elsevier", journal = "Microelectronic Engineering", title = "Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption", volume = "87", number = "5-8", pages = "1181-1184", doi = "10.1016/j.mee.2009.12.039" }
Đurić, Z. G., Jokić, I., Djukic, M. M.,& Frantlović, M.. (2010). Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption. in Microelectronic Engineering Elsevier., 87(5-8), 1181-1184. https://doi.org/10.1016/j.mee.2009.12.039
Đurić ZG, Jokić I, Djukic MM, Frantlović M. Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption. in Microelectronic Engineering. 2010;87(5-8):1181-1184. doi:10.1016/j.mee.2009.12.039 .
Đurić, Zoran G., Jokić, Ivana, Djukic, Maja M., Frantlović, Miloš, "Fluctuations of the adsorbed mass and the resonant frequency of vibrating MEMS/NEMS structures due to multilayer adsorption" in Microelectronic Engineering, 87, no. 5-8 (2010):1181-1184, https://doi.org/10.1016/j.mee.2009.12.039 . .