Multipurpose thermal sensor based on Seebeck effect
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2002
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Institute of Electrical and Electronics Engineers Inc (IEEE)
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This paper reports a multipurpose thermal sensor based on the Seebeck effect. The sensor has thermocouples with a multilayer structure consisting of one thermocouple strip laying on the insulating membrane and the other one under the first thermoelement and the membrane. The vertical arrangement allows a greater number of thermocouples to be placed on a given chip area. Central and lateral thermistors are placed near hot and cold thermocouple junctions, respectively, and serve for determination of the temperature difference established on the chip. Experimental results confirm that the same structure could be used as a thermal converter and a gas flow meter.
Keywords:
temperature sensors / Seebeck effect / thermocouples / thermistors / flowmeters / membranes / Gas flow meters / Gas flow sensors / Thermal converters / Thermal sensorsSource:
Proceedings - 23rd International Conference on Microelectronics, MIEL 2002, 2002, 1, 261-264Publisher:
- Institute of Electrical and Electronics Engineers Inc (IEEE)
Note:
- 12-15 May 2002, Niš, Yugoslavia
DOI: 10.1109/MIEL.2002.1003189
ISBN: 0-7803-7235-2
WoS: 000176359700048
Scopus: 2-s2.0-38349100129
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IHTMTY - CONF AU - Randjelović, Danijela AU - Kaltsas, Grigoris AU - Lazić, Žarko AU - Popović, Mirjana PY - 2002 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/7059 AB - This paper reports a multipurpose thermal sensor based on the Seebeck effect. The sensor has thermocouples with a multilayer structure consisting of one thermocouple strip laying on the insulating membrane and the other one under the first thermoelement and the membrane. The vertical arrangement allows a greater number of thermocouples to be placed on a given chip area. Central and lateral thermistors are placed near hot and cold thermocouple junctions, respectively, and serve for determination of the temperature difference established on the chip. Experimental results confirm that the same structure could be used as a thermal converter and a gas flow meter. PB - Institute of Electrical and Electronics Engineers Inc (IEEE) C3 - Proceedings - 23rd International Conference on Microelectronics, MIEL 2002 T1 - Multipurpose thermal sensor based on Seebeck effect VL - 1 SP - 261 EP - 264 DO - 10.1109/MIEL.2002.1003189 ER -
@conference{ author = "Randjelović, Danijela and Kaltsas, Grigoris and Lazić, Žarko and Popović, Mirjana", year = "2002", abstract = "This paper reports a multipurpose thermal sensor based on the Seebeck effect. The sensor has thermocouples with a multilayer structure consisting of one thermocouple strip laying on the insulating membrane and the other one under the first thermoelement and the membrane. The vertical arrangement allows a greater number of thermocouples to be placed on a given chip area. Central and lateral thermistors are placed near hot and cold thermocouple junctions, respectively, and serve for determination of the temperature difference established on the chip. Experimental results confirm that the same structure could be used as a thermal converter and a gas flow meter.", publisher = "Institute of Electrical and Electronics Engineers Inc (IEEE)", journal = "Proceedings - 23rd International Conference on Microelectronics, MIEL 2002", title = "Multipurpose thermal sensor based on Seebeck effect", volume = "1", pages = "261-264", doi = "10.1109/MIEL.2002.1003189" }
Randjelović, D., Kaltsas, G., Lazić, Ž.,& Popović, M.. (2002). Multipurpose thermal sensor based on Seebeck effect. in Proceedings - 23rd International Conference on Microelectronics, MIEL 2002 Institute of Electrical and Electronics Engineers Inc (IEEE)., 1, 261-264. https://doi.org/10.1109/MIEL.2002.1003189
Randjelović D, Kaltsas G, Lazić Ž, Popović M. Multipurpose thermal sensor based on Seebeck effect. in Proceedings - 23rd International Conference on Microelectronics, MIEL 2002. 2002;1:261-264. doi:10.1109/MIEL.2002.1003189 .
Randjelović, Danijela, Kaltsas, Grigoris, Lazić, Žarko, Popović, Mirjana, "Multipurpose thermal sensor based on Seebeck effect" in Proceedings - 23rd International Conference on Microelectronics, MIEL 2002, 1 (2002):261-264, https://doi.org/10.1109/MIEL.2002.1003189 . .