Role of electronic excitations in FEBID processes
2017
Preuzimanje 🢃
Konferencijski prilog (Objavljena verzija)
Metapodaci
Prikaz svih podataka o dokumentuApstrakt
Four mechanisms contribute to the electron-driven degradation of the FEBID precursors: dissociative electron attachment (DEA), dissociative ionization (DI), neutral dissociation (ND) and dipolar dissociation (DD). Thorough understanding of these processes, would ideally, lead to a rational design of precursors where the processes yielding the desired deposit properties dominate. Here, the significance of ND process will be reviewed. ND process is mediated by electronically excited states of a precursor, where electronic excitations from bonding to anti-bonding orbitals can result in a ligand loss along the dissociative potential energy surfaces. Quantum mechanical calculations on precursors, describing their electronic structure and the potential energy surfaces for electronically excited states, are, therefore, inevitable part of the ND studies. These calculations, however, present number of challenges that will be addressed in this talk, along with future perspectives that could lead... to better understanding of dissociative electronic excitations.
Ključne reči:
electron-driven degradation / FEBID / neutral dissociation / Quantum mechanical calculations / potential energy surfaces / excited statesIzvor:
Book of abstracts - 4th CELINA 2017 annual meeting, 13.09-16.09.2017, Porto, Portugal, 2017, 24-24Izdavač:
- Chemistry for Electron-Induced Nanofabrication (CELINA) COST Action CM1301
Finansiranje / projekti:
- Chemistry for Electron-Induced Nanofabrication (CELINA) COST Action CM1301
URI
https://celina.uni-bremen.de/celina/index.php?id=Events&lang=enhttps://cer.ihtm.bg.ac.rs/handle/123456789/6729
Institucija/grupa
IHTMTY - CONF AU - Zlatar, Matija PY - 2017 UR - https://celina.uni-bremen.de/celina/index.php?id=Events&lang=en UR - https://cer.ihtm.bg.ac.rs/handle/123456789/6729 AB - Four mechanisms contribute to the electron-driven degradation of the FEBID precursors: dissociative electron attachment (DEA), dissociative ionization (DI), neutral dissociation (ND) and dipolar dissociation (DD). Thorough understanding of these processes, would ideally, lead to a rational design of precursors where the processes yielding the desired deposit properties dominate. Here, the significance of ND process will be reviewed. ND process is mediated by electronically excited states of a precursor, where electronic excitations from bonding to anti-bonding orbitals can result in a ligand loss along the dissociative potential energy surfaces. Quantum mechanical calculations on precursors, describing their electronic structure and the potential energy surfaces for electronically excited states, are, therefore, inevitable part of the ND studies. These calculations, however, present number of challenges that will be addressed in this talk, along with future perspectives that could lead to better understanding of dissociative electronic excitations. PB - Chemistry for Electron-Induced Nanofabrication (CELINA) COST Action CM1301 C3 - Book of abstracts - 4th CELINA 2017 annual meeting, 13.09-16.09.2017, Porto, Portugal T1 - Role of electronic excitations in FEBID processes SP - 24 EP - 24 UR - https://hdl.handle.net/21.15107/rcub_cer_6729 ER -
@conference{ author = "Zlatar, Matija", year = "2017", abstract = "Four mechanisms contribute to the electron-driven degradation of the FEBID precursors: dissociative electron attachment (DEA), dissociative ionization (DI), neutral dissociation (ND) and dipolar dissociation (DD). Thorough understanding of these processes, would ideally, lead to a rational design of precursors where the processes yielding the desired deposit properties dominate. Here, the significance of ND process will be reviewed. ND process is mediated by electronically excited states of a precursor, where electronic excitations from bonding to anti-bonding orbitals can result in a ligand loss along the dissociative potential energy surfaces. Quantum mechanical calculations on precursors, describing their electronic structure and the potential energy surfaces for electronically excited states, are, therefore, inevitable part of the ND studies. These calculations, however, present number of challenges that will be addressed in this talk, along with future perspectives that could lead to better understanding of dissociative electronic excitations.", publisher = "Chemistry for Electron-Induced Nanofabrication (CELINA) COST Action CM1301", journal = "Book of abstracts - 4th CELINA 2017 annual meeting, 13.09-16.09.2017, Porto, Portugal", title = "Role of electronic excitations in FEBID processes", pages = "24-24", url = "https://hdl.handle.net/21.15107/rcub_cer_6729" }
Zlatar, M.. (2017). Role of electronic excitations in FEBID processes. in Book of abstracts - 4th CELINA 2017 annual meeting, 13.09-16.09.2017, Porto, Portugal Chemistry for Electron-Induced Nanofabrication (CELINA) COST Action CM1301., 24-24. https://hdl.handle.net/21.15107/rcub_cer_6729
Zlatar M. Role of electronic excitations in FEBID processes. in Book of abstracts - 4th CELINA 2017 annual meeting, 13.09-16.09.2017, Porto, Portugal. 2017;:24-24. https://hdl.handle.net/21.15107/rcub_cer_6729 .
Zlatar, Matija, "Role of electronic excitations in FEBID processes" in Book of abstracts - 4th CELINA 2017 annual meeting, 13.09-16.09.2017, Porto, Portugal (2017):24-24, https://hdl.handle.net/21.15107/rcub_cer_6729 .