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Ojačanje dijafragme senzora pritiska nagrizanjem u vodenom rastvoru TMAH koncentracije 25 tež. %
Reinforcement of the pressure sensor diaphragm by etching in 25%tmah water solution
dc.creator | Smiljanić, Milče M. | |
dc.creator | Matić, Milan | |
dc.creator | Radulović, Katarina | |
dc.creator | Lazić, Žarko | |
dc.creator | Jović, Vesna | |
dc.date.accessioned | 2023-02-26T13:57:50Z | |
dc.date.available | 2023-02-26T13:57:50Z | |
dc.date.issued | 2012 | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/5799 | |
dc.description.abstract | Primenom maskless tehnike, koja se bazira na vlažnom hemijskom nagrizanju u vodenom rastvoru TMAH koncentracije 25 tež. %. na temperaturi od 80 0 C, na Si pločice uspešno su napravljene dijafragme sa ojačanjem. Ojačanje je projektovano za ravne kvadratne dijafragme debljine 30 μm i površine 2040 μm x 2040 μm, čiji je nominalni opseg rada 1 bar. Vrednost pritiska na kojoj neojačana dijafragma puca je 12 bar. Eksperimentalno je pokazano da je ojačanje povećalo pritisak na kojem puca dijafragma 1.8 puta za dijafragmu sa ojačanjem širine 90 μm, odnosno 2.5 puta za dijafragmu sa ojačanjem širine 40 μm. Ovo poboljšanje pokazuje da je u okviru samog senzora moguće MEMS tehnologijama povećati vrednost pritiska na kojem dolazi do pucanja dijafragme i njenog nepopravljivog oštećenja. | sr |
dc.description.abstract | Reinforcements of a pressure sensor diaphragm have been designed and fabricated on the Si wafers by maskless wet etching technique. Maskless wet etching technique has been performed in the 25% TMAH water solution at the temperature of 800. Reinforcements are designed for the 30 μm thick and flat square diaphragm. Area of the diaphragm is 2040 μm x 2040 μm. Operation pressure range of the flat diagrapham is 1 bar. Measured burst pressure of the flat diaphragm is 12 bar. For the samples of the diaphragm with the 90 μm wide reinforcement measured burst pressures are 1.8 times higher than for the flat one. For the samples of the diaphragm with the 40 μm wide reinforcement measured burst pressures are 2.5 times higher than for the flat one. Higher measured burst pressures of the diaphragms with reinforcements show that the improvement is possible on the sensor level by using maskless wet etching technique. | sr |
dc.language.iso | sr | sr |
dc.publisher | ETRAN Society | sr |
dc.relation | info:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS// | sr |
dc.rights | openAccess | sr |
dc.rights.uri | https://creativecommons.org/licenses/by/4.0/ | |
dc.source | Zbornik radova 56. Konferencije za ETRAN, 11-14. juna 2012. Zlatibor / Proceedings 56th ETRAN Conference, June 11-14, 2012, Zlatibor | sr |
dc.subject | TMAH | sr |
dc.subject | dijafragme | sr |
dc.subject | MEMS | sr |
dc.title | Ojačanje dijafragme senzora pritiska nagrizanjem u vodenom rastvoru TMAH koncentracije 25 tež. % | sr |
dc.title | Reinforcement of the pressure sensor diaphragm by etching in 25%tmah water solution | sr |
dc.type | conferenceObject | sr |
dc.rights.license | BY | sr |
dc.citation.spage | MO3.1-1 | |
dc.citation.epage | MO3.1-4 | |
dc.identifier.rcub | https://hdl.handle.net/21.15107/rcub_cer_5799 | |
dc.identifier.fulltext | http://cer.ihtm.bg.ac.rs/bitstream/id/24098/bitstream_24098.pdf | |
dc.type.version | publishedVersion | sr |