MEMS/NEMS sensors of chemical and biological agents: applicability of different models for stedy-state analysis of sensor time response and noise
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We analyze the time response of MEMS/NEMS sensors of chemical and biological agents and its noise, by using two mathematical models. One of them is commonly used in the literature on MEMS/NEMS adsorption-based chemical and biological sensors, while the other one, which is more elaborate, and takes into account additional relevant physical processes, has been developed by us. We also investigate the limits of applicability of the two models as a function of the target substance concentration, especially having in mind the decrease of the minimal detectable concentration in the new sensor generation.
Keywords:
chemical sensor / biosensor / time response / adsorption-desorption noise / steady-state analysisSource:
Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade, 2018Publisher:
- Belgrade : The Military Technical Institute
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
- Serbian Academy of Sciences and Arts (Project F-150)
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IHTMTY - CONF AU - Jokić, Ivana AU - Radulović, Katarina AU - Frantlović, Miloš AU - Đurić, Zoran AU - Krstajić, Predrag PY - 2018 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5709 AB - We analyze the time response of MEMS/NEMS sensors of chemical and biological agents and its noise, by using two mathematical models. One of them is commonly used in the literature on MEMS/NEMS adsorption-based chemical and biological sensors, while the other one, which is more elaborate, and takes into account additional relevant physical processes, has been developed by us. We also investigate the limits of applicability of the two models as a function of the target substance concentration, especially having in mind the decrease of the minimal detectable concentration in the new sensor generation. PB - Belgrade : The Military Technical Institute C3 - Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade T1 - MEMS/NEMS sensors of chemical and biological agents: applicability of different models for stedy-state analysis of sensor time response and noise UR - https://hdl.handle.net/21.15107/rcub_cer_5709 ER -
@conference{ author = "Jokić, Ivana and Radulović, Katarina and Frantlović, Miloš and Đurić, Zoran and Krstajić, Predrag", year = "2018", abstract = "We analyze the time response of MEMS/NEMS sensors of chemical and biological agents and its noise, by using two mathematical models. One of them is commonly used in the literature on MEMS/NEMS adsorption-based chemical and biological sensors, while the other one, which is more elaborate, and takes into account additional relevant physical processes, has been developed by us. We also investigate the limits of applicability of the two models as a function of the target substance concentration, especially having in mind the decrease of the minimal detectable concentration in the new sensor generation.", publisher = "Belgrade : The Military Technical Institute", journal = "Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade", title = "MEMS/NEMS sensors of chemical and biological agents: applicability of different models for stedy-state analysis of sensor time response and noise", url = "https://hdl.handle.net/21.15107/rcub_cer_5709" }
Jokić, I., Radulović, K., Frantlović, M., Đurić, Z.,& Krstajić, P.. (2018). MEMS/NEMS sensors of chemical and biological agents: applicability of different models for stedy-state analysis of sensor time response and noise. in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade Belgrade : The Military Technical Institute.. https://hdl.handle.net/21.15107/rcub_cer_5709
Jokić I, Radulović K, Frantlović M, Đurić Z, Krstajić P. MEMS/NEMS sensors of chemical and biological agents: applicability of different models for stedy-state analysis of sensor time response and noise. in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade. 2018;. https://hdl.handle.net/21.15107/rcub_cer_5709 .
Jokić, Ivana, Radulović, Katarina, Frantlović, Miloš, Đurić, Zoran, Krstajić, Predrag, "MEMS/NEMS sensors of chemical and biological agents: applicability of different models for stedy-state analysis of sensor time response and noise" in Proceedings - 8th International Scientific Conference of Defensive Technologies, OTEH 2018, 11-12.10.2018, Belgrade (2018), https://hdl.handle.net/21.15107/rcub_cer_5709 .