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Experimental determination of silicon pressure sensor diaphragm deflection
dc.creator | Đurić, Zoran G. | |
dc.creator | Matić, Milan J. | |
dc.creator | Matović, Jovan | |
dc.creator | Petrović, Radomir | |
dc.creator | Simičić, Nevenka | |
dc.date.accessioned | 2021-04-16T12:07:55Z | |
dc.date.available | 2021-04-16T12:07:55Z | |
dc.date.issued | 1990 | |
dc.identifier.issn | 0924-4247 | |
dc.identifier.uri | https://cer.ihtm.bg.ac.rs/handle/123456789/4457 | |
dc.description.abstract | A method is presented for the accurate determination of the deflection of diaphragms commonly used for miniature piezoresistive and capacitive pressure sensors. The method utilizes a well-known apparatus for thin-film thickness measurements (Talystep), an instrument for accurate pressure measurement and control (Mensor) and a sample holder for simultaneous pressure application and diaphragm deflection measurement. The deflection measurements for a stiffened and a square diaphragm are presented and compared to analytically calculated results from the literature. High-precision deflection measurements reveal the existence of build-in stresses. | sr |
dc.language.iso | en | sr |
dc.publisher | Elsevier | sr |
dc.rights | restrictedAccess | sr |
dc.source | Sensors and Actuators: A.Physical | sr |
dc.subject | silicon | sr |
dc.subject | Pressure Transducers | sr |
dc.subject | Pressure Sensors | sr |
dc.subject | Semiconductor Devices--Diaphragms | sr |
dc.subject | Semiconducting Silicon | sr |
dc.title | Experimental determination of silicon pressure sensor diaphragm deflection | sr |
dc.type | article | sr |
dc.rights.license | ARR | sr |
dcterms.abstract | Матовић, Јован; Ђурић, Зоран; Матић, Милан Ј.; Петровић, Радомир; Симичић, Невенка; | |
dc.citation.volume | 24 | |
dc.citation.issue | 3 | |
dc.citation.spage | 175 | |
dc.citation.epage | 179 | |
dc.identifier.doi | 10.1016/0924-4247(90)80053-8 | |
dc.identifier.scopus | 2-s2.0-0025488617 | |
dc.type.version | publishedVersion | sr |