Modeling Noise and Stability of Affinity-Based MEMS, NEMS and NOEMS Sensors of Ternary Gas Mixtures
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2019
Authors
Jakšić, OlgaJokić, Ivana
Jakšić, Zoran
Obradov, Marko
Tanasković, Dragan
Randjelović, Danijela
Vasiljević-Radović, Dana
Conference object (Published version)
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IEEE
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We address noise and stability of adsorptionbased sensing of ternary gas mixtures in affinity-based MEMS, NEMS and NOEMS sensors. We investigate mechanisms of such chemical sensing in diverse industrial environments where ternary gas mixtures are of importance. In all existing sensing devices signal fluctuations determine their ultimate performance, and in affinity-based nanodevices the prevailing noise is caused by adsorption and desorption of different species at the sensor surface. We consider analytically and numerically detection of three-component gas mixtures. We present results obtained by applying the conventional method for assessing stability of chemical reactions to three component monolayer adsorption. Gas molecules modeling as spherical particles is suitable for applying any model regarding population dynamics, but taking molecular dimension and orientation into account is more realistic. Noise analysis in time and frequency domain is performed for two different classes o...f ultrahigh sensitivity adsorption based gas sensors: (nano) plasmonic sensors (refractometric devices) and MEMS/NEMS resonator-based devices.
Keywords:
adsorption / desorption / gas mixtures / gas sensors / microsensors / monolayers / nanophotonics / nanosensors / numerical analysis / optical sensors / time-frequency analysisSource:
2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings, 2019, 165-168Publisher:
- Institute of Electrical and Electronics Engineers (IEEE)
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
DOI: 10.1109/MIEL.2019.8889577
ISBN: 978-1-7281-3419-2
Scopus: 2-s2.0-85075400605
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IHTMTY - CONF AU - Jakšić, Olga AU - Jokić, Ivana AU - Jakšić, Zoran AU - Obradov, Marko AU - Tanasković, Dragan AU - Randjelović, Danijela AU - Vasiljević-Radović, Dana PY - 2019 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/3239 AB - We address noise and stability of adsorptionbased sensing of ternary gas mixtures in affinity-based MEMS, NEMS and NOEMS sensors. We investigate mechanisms of such chemical sensing in diverse industrial environments where ternary gas mixtures are of importance. In all existing sensing devices signal fluctuations determine their ultimate performance, and in affinity-based nanodevices the prevailing noise is caused by adsorption and desorption of different species at the sensor surface. We consider analytically and numerically detection of three-component gas mixtures. We present results obtained by applying the conventional method for assessing stability of chemical reactions to three component monolayer adsorption. Gas molecules modeling as spherical particles is suitable for applying any model regarding population dynamics, but taking molecular dimension and orientation into account is more realistic. Noise analysis in time and frequency domain is performed for two different classes of ultrahigh sensitivity adsorption based gas sensors: (nano) plasmonic sensors (refractometric devices) and MEMS/NEMS resonator-based devices. PB - Institute of Electrical and Electronics Engineers (IEEE) C3 - 2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings T1 - Modeling Noise and Stability of Affinity-Based MEMS, NEMS and NOEMS Sensors of Ternary Gas Mixtures SP - 165 EP - 168 DO - 10.1109/MIEL.2019.8889577 ER -
@conference{ author = "Jakšić, Olga and Jokić, Ivana and Jakšić, Zoran and Obradov, Marko and Tanasković, Dragan and Randjelović, Danijela and Vasiljević-Radović, Dana", year = "2019", abstract = "We address noise and stability of adsorptionbased sensing of ternary gas mixtures in affinity-based MEMS, NEMS and NOEMS sensors. We investigate mechanisms of such chemical sensing in diverse industrial environments where ternary gas mixtures are of importance. In all existing sensing devices signal fluctuations determine their ultimate performance, and in affinity-based nanodevices the prevailing noise is caused by adsorption and desorption of different species at the sensor surface. We consider analytically and numerically detection of three-component gas mixtures. We present results obtained by applying the conventional method for assessing stability of chemical reactions to three component monolayer adsorption. Gas molecules modeling as spherical particles is suitable for applying any model regarding population dynamics, but taking molecular dimension and orientation into account is more realistic. Noise analysis in time and frequency domain is performed for two different classes of ultrahigh sensitivity adsorption based gas sensors: (nano) plasmonic sensors (refractometric devices) and MEMS/NEMS resonator-based devices.", publisher = "Institute of Electrical and Electronics Engineers (IEEE)", journal = "2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings", title = "Modeling Noise and Stability of Affinity-Based MEMS, NEMS and NOEMS Sensors of Ternary Gas Mixtures", pages = "165-168", doi = "10.1109/MIEL.2019.8889577" }
Jakšić, O., Jokić, I., Jakšić, Z., Obradov, M., Tanasković, D., Randjelović, D.,& Vasiljević-Radović, D.. (2019). Modeling Noise and Stability of Affinity-Based MEMS, NEMS and NOEMS Sensors of Ternary Gas Mixtures. in 2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings Institute of Electrical and Electronics Engineers (IEEE)., 165-168. https://doi.org/10.1109/MIEL.2019.8889577
Jakšić O, Jokić I, Jakšić Z, Obradov M, Tanasković D, Randjelović D, Vasiljević-Radović D. Modeling Noise and Stability of Affinity-Based MEMS, NEMS and NOEMS Sensors of Ternary Gas Mixtures. in 2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings. 2019;:165-168. doi:10.1109/MIEL.2019.8889577 .
Jakšić, Olga, Jokić, Ivana, Jakšić, Zoran, Obradov, Marko, Tanasković, Dragan, Randjelović, Danijela, Vasiljević-Radović, Dana, "Modeling Noise and Stability of Affinity-Based MEMS, NEMS and NOEMS Sensors of Ternary Gas Mixtures" in 2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings (2019):165-168, https://doi.org/10.1109/MIEL.2019.8889577 . .