Temperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensors
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2014
Authors
Frantlović, MilošJokić, Ivana
Lazić, Žarko
Vukelic, B.
Obradov, Marko
Vasiljević-Radović, Dana
Conference object (Published version)
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Show full item recordAbstract
In industrial processes, as well as in many other fields from vehicles to healthcare, temperature and pressure are the most common parameters to be measured and monitored. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, widely used in the industry in various measurement configurations. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance. However, it can be utilized for temperature measurement, thus enabling new sensor applications. In this paper a method is presented for temperature measurement using MEMS piezoresistive pressure sensors.
Source:
Proceedings of the International Conference on Microelectronics, ICM, 2014, 159-161Publisher:
- Institute of Electrical and Electronics Engineers Inc.
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-32008)
DOI: 10.1109/MIEL.2014.6842110
ISSN: 2159-1660
WoS: 000360788600030
Scopus: 2-s2.0-84904619057
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IHTMTY - CONF AU - Frantlović, Miloš AU - Jokić, Ivana AU - Lazić, Žarko AU - Vukelic, B. AU - Obradov, Marko AU - Vasiljević-Radović, Dana PY - 2014 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/1452 AB - In industrial processes, as well as in many other fields from vehicles to healthcare, temperature and pressure are the most common parameters to be measured and monitored. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, widely used in the industry in various measurement configurations. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance. However, it can be utilized for temperature measurement, thus enabling new sensor applications. In this paper a method is presented for temperature measurement using MEMS piezoresistive pressure sensors. PB - Institute of Electrical and Electronics Engineers Inc. C3 - Proceedings of the International Conference on Microelectronics, ICM T1 - Temperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensors SP - 159 EP - 161 DO - 10.1109/MIEL.2014.6842110 ER -
@conference{ author = "Frantlović, Miloš and Jokić, Ivana and Lazić, Žarko and Vukelic, B. and Obradov, Marko and Vasiljević-Radović, Dana", year = "2014", abstract = "In industrial processes, as well as in many other fields from vehicles to healthcare, temperature and pressure are the most common parameters to be measured and monitored. Silicon microelectromechanical (MEMS) piezoresistive pressure sensors are the first and the most successful MEMS sensors, widely used in the industry in various measurement configurations. The inherent temperature dependence of the output signal of such sensors adversely affects their pressure measurement performance. However, it can be utilized for temperature measurement, thus enabling new sensor applications. In this paper a method is presented for temperature measurement using MEMS piezoresistive pressure sensors.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "Proceedings of the International Conference on Microelectronics, ICM", title = "Temperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensors", pages = "159-161", doi = "10.1109/MIEL.2014.6842110" }
Frantlović, M., Jokić, I., Lazić, Ž., Vukelic, B., Obradov, M.,& Vasiljević-Radović, D.. (2014). Temperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensors. in Proceedings of the International Conference on Microelectronics, ICM Institute of Electrical and Electronics Engineers Inc.., 159-161. https://doi.org/10.1109/MIEL.2014.6842110
Frantlović M, Jokić I, Lazić Ž, Vukelic B, Obradov M, Vasiljević-Radović D. Temperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensors. in Proceedings of the International Conference on Microelectronics, ICM. 2014;:159-161. doi:10.1109/MIEL.2014.6842110 .
Frantlović, Miloš, Jokić, Ivana, Lazić, Žarko, Vukelic, B., Obradov, Marko, Vasiljević-Radović, Dana, "Temperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensors" in Proceedings of the International Conference on Microelectronics, ICM (2014):159-161, https://doi.org/10.1109/MIEL.2014.6842110 . .