Приказ основних података о документу

dc.creatorĐurić, Zoran G.
dc.creatorJokić, Ivana
dc.creatorFrantlović, Miloš
dc.creatorJakšić, Olga
dc.date.accessioned2019-01-30T17:10:43Z
dc.date.available2019-01-30T17:10:43Z
dc.date.issued2002
dc.identifier.isbn0-7803-7235-2
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/87
dc.description.abstractScientists in the field of NEMS today are focused on the problem of achieving the lowest detectable mass of the atomic force microscope and molecular microscope probes. This paper deals with this problem starting from the theory of the adsorptiondesorption noise and also the noise caused by temperature fluctuations and Johnson's noise. We found that the adsorptiondesorption noise clearly exceeds the noise of the other sources at lower frequencies. According to the results we obtained for a typical microcantilever fabricated by NEMS processes, the order of magnitude of the noise equivalent mass (NEM) is NEM∼104 D (1 D=1.710-27 kg).en
dc.publisherIEEE Computer Society
dc.rightsrestrictedAccess
dc.source23rd International Conference on Microelectronics, MIEL 2002 - Proceedings
dc.subjectResonant frequency
dc.subjectAtomic force microscopy
dc.subjectNanoelectromechanical systems
dc.subjectFrequency measurement
dc.subjectNoise measurement
dc.subjectMicromechanical devices
dc.subjectForce measurement
dc.titleInfluence of adsorption-desorption process on resonant frequency and noise of micro-and nanocantileversen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractЂурић, Зоран Г.; Франтловић, Милош; Јокић, Ивана; Јакшић, Олга;
dc.citation.volume1
dc.citation.spage243
dc.citation.epage246
dc.citation.other1: 243-246
dc.identifier.doi10.1109/MIEL.2002.1003185
dc.identifier.scopus2-s2.0-3142744369
dc.type.versionpublishedVersion


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Приказ основних података о документу