Intelligent thermopile-based vacuum sensor
2011
Аутори
Randjelović, DanijelaFrantlović, Miloš
Miljkovic, B.
Rosandic, B.
Jakšić, Zoran
Popović, Bogdan
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.
Кључне речи:
vacuum sensor / intelligent sensor / thermopile / pressure measurementИзвор:
Eurosensors Xxv, 2011, 25Издавач:
- Elsevier
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-32008)
- Reinforcement of Regional Microsystems and Nanosystems Centre (EU-205533)
DOI: 10.1016/j.proeng.2011.12.143
ISSN: 1877-7058
WoS: 000300512400140
Scopus: 2-s2.0-84857184202
Институција/група
IHTMTY - CONF AU - Randjelović, Danijela AU - Frantlović, Miloš AU - Miljkovic, B. AU - Rosandic, B. AU - Jakšić, Zoran AU - Popović, Bogdan PY - 2011 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/832 AB - We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors. PB - Elsevier C3 - Eurosensors Xxv T1 - Intelligent thermopile-based vacuum sensor VL - 25 DO - 10.1016/j.proeng.2011.12.143 ER -
@conference{ author = "Randjelović, Danijela and Frantlović, Miloš and Miljkovic, B. and Rosandic, B. and Jakšić, Zoran and Popović, Bogdan", year = "2011", abstract = "We report here the development of a simple and low-cost intelligent vacuum sensor based on multipurpose thermopile MEMS chips. Our devices have a p(+)Si heater and two thermopiles with 30 p(+)Si/Al thermocouples each. Thermal and electrical isolation is provided by a sandwich membrane (residual n-Si and sputtered oxide). The sensor utilizes for its intelligent mode of operation a modified version of an existing processing module we developed for our piezoresistive sensors.", publisher = "Elsevier", journal = "Eurosensors Xxv", title = "Intelligent thermopile-based vacuum sensor", volume = "25", doi = "10.1016/j.proeng.2011.12.143" }
Randjelović, D., Frantlović, M., Miljkovic, B., Rosandic, B., Jakšić, Z.,& Popović, B.. (2011). Intelligent thermopile-based vacuum sensor. in Eurosensors Xxv Elsevier., 25. https://doi.org/10.1016/j.proeng.2011.12.143
Randjelović D, Frantlović M, Miljkovic B, Rosandic B, Jakšić Z, Popović B. Intelligent thermopile-based vacuum sensor. in Eurosensors Xxv. 2011;25. doi:10.1016/j.proeng.2011.12.143 .
Randjelović, Danijela, Frantlović, Miloš, Miljkovic, B., Rosandic, B., Jakšić, Zoran, Popović, Bogdan, "Intelligent thermopile-based vacuum sensor" in Eurosensors Xxv, 25 (2011), https://doi.org/10.1016/j.proeng.2011.12.143 . .