Photolithography-based Fabrication of Interdigitated Electrodes with Integrated Gold Microheater: Temperature Distribution Study

Abstract

Interdigitated electrodes with integrated heaters fabricated on a Si platform were investigated in this study. The electrodes and heaters were made of gold, using standard photolithography processes. The primary objective was to analyze the maximum temperature achievable on the microheater and characterize its temperature distribution. The integrated heater achieved a maximum temperature of 420 °C with an applied voltage of 16 V. The temperature distribution was uniform across the entire surface of the heater, which was located on the underside of the chip beneath the interdigitated electrodes. At higher temperatures, the silver paste, utilized as a bonding agent between the copper wires and heater, underwent melting.