Eksperimentalno određivanje optimalne linearnosti senzora pritiska
Experimental Determination of Optimal Piezoresistive Pressure Sensor Linearity
Abstract
Projektovani su i urađeni piezootporni čipovi za
merenje pritiska od 1 bar do 400 bar u 5 m tehnologiji.
Snimljeni su položaji i izmerene linearnosti svih piezootpornika.
Uočena je pravilnost promene linearnosti sa položajem
piezootpornika i na osnovu toga određen je položaj u kome je
ukupna nelinearnost izlaza senzora minimalna. Postignuta je
izuzetna linearnost senzora sve do granice pucanja dijafragme.
Urađena je simulacija napona na projektovanom čipu i rezultati
su upoređeni sa eksperimentom
The piezoresistive chips for pressure measurements from 1 to 400 bar, in 5 micrometer technology, are designed and produced. The linearity and position of all piezoresistors are measured and infrared photos are made. A function of linearity change in dependence of resistor position is noticed. In accordance with that regularity the position with optimal total linearity is determined. Exceptional sensor linearity to the burst pressure is achieved. A simulation of designed chip
is fulfilled and comparison with experimental results is done.
Keywords:
piezootporni senzor / nelinearnost / FEM simulacija.Source:
Zbornik 57. konferencije ETRAN, 3-6. jun 2013, Zlatibor / Proceedings of 57th ETRAN Conference, June 3-6, 2013, Zlatibor, Serbia, 2013, MO3.1.1-MO3.1.6Publisher:
- ETRAN Society
Funding / projects:
- Micro- Nanosystems and Sensors for Electric Power and Process Industry and Environmental Protection (RS-MESTD-Technological Development (TD or TR)-32008)
Collections
Institution/Community
IHTMTY - CONF AU - Matić, Milan AU - Lazić, Žarko AU - Radulović, Katarina AU - Smiljanić, Milče M. AU - Rašljić, Milena PY - 2013 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5814 AB - Projektovani su i urađeni piezootporni čipovi za merenje pritiska od 1 bar do 400 bar u 5 m tehnologiji. Snimljeni su položaji i izmerene linearnosti svih piezootpornika. Uočena je pravilnost promene linearnosti sa položajem piezootpornika i na osnovu toga određen je položaj u kome je ukupna nelinearnost izlaza senzora minimalna. Postignuta je izuzetna linearnost senzora sve do granice pucanja dijafragme. Urađena je simulacija napona na projektovanom čipu i rezultati su upoređeni sa eksperimentom AB - The piezoresistive chips for pressure measurements from 1 to 400 bar, in 5 micrometer technology, are designed and produced. The linearity and position of all piezoresistors are measured and infrared photos are made. A function of linearity change in dependence of resistor position is noticed. In accordance with that regularity the position with optimal total linearity is determined. Exceptional sensor linearity to the burst pressure is achieved. A simulation of designed chip is fulfilled and comparison with experimental results is done. PB - ETRAN Society C3 - Zbornik 57. konferencije ETRAN, 3-6. jun 2013, Zlatibor / Proceedings of 57th ETRAN Conference, June 3-6, 2013, Zlatibor, Serbia T1 - Eksperimentalno određivanje optimalne linearnosti senzora pritiska T1 - Experimental Determination of Optimal Piezoresistive Pressure Sensor Linearity SP - MO3.1.1 EP - MO3.1.6 UR - https://hdl.handle.net/21.15107/rcub_cer_5814 ER -
@conference{ author = "Matić, Milan and Lazić, Žarko and Radulović, Katarina and Smiljanić, Milče M. and Rašljić, Milena", year = "2013", abstract = "Projektovani su i urađeni piezootporni čipovi za merenje pritiska od 1 bar do 400 bar u 5 m tehnologiji. Snimljeni su položaji i izmerene linearnosti svih piezootpornika. Uočena je pravilnost promene linearnosti sa položajem piezootpornika i na osnovu toga određen je položaj u kome je ukupna nelinearnost izlaza senzora minimalna. Postignuta je izuzetna linearnost senzora sve do granice pucanja dijafragme. Urađena je simulacija napona na projektovanom čipu i rezultati su upoređeni sa eksperimentom, The piezoresistive chips for pressure measurements from 1 to 400 bar, in 5 micrometer technology, are designed and produced. The linearity and position of all piezoresistors are measured and infrared photos are made. A function of linearity change in dependence of resistor position is noticed. In accordance with that regularity the position with optimal total linearity is determined. Exceptional sensor linearity to the burst pressure is achieved. A simulation of designed chip is fulfilled and comparison with experimental results is done.", publisher = "ETRAN Society", journal = "Zbornik 57. konferencije ETRAN, 3-6. jun 2013, Zlatibor / Proceedings of 57th ETRAN Conference, June 3-6, 2013, Zlatibor, Serbia", title = "Eksperimentalno određivanje optimalne linearnosti senzora pritiska, Experimental Determination of Optimal Piezoresistive Pressure Sensor Linearity", pages = "MO3.1.1-MO3.1.6", url = "https://hdl.handle.net/21.15107/rcub_cer_5814" }
Matić, M., Lazić, Ž., Radulović, K., Smiljanić, M. M.,& Rašljić, M.. (2013). Eksperimentalno određivanje optimalne linearnosti senzora pritiska. in Zbornik 57. konferencije ETRAN, 3-6. jun 2013, Zlatibor / Proceedings of 57th ETRAN Conference, June 3-6, 2013, Zlatibor, Serbia ETRAN Society., MO3.1.1-MO3.1.6. https://hdl.handle.net/21.15107/rcub_cer_5814
Matić M, Lazić Ž, Radulović K, Smiljanić MM, Rašljić M. Eksperimentalno određivanje optimalne linearnosti senzora pritiska. in Zbornik 57. konferencije ETRAN, 3-6. jun 2013, Zlatibor / Proceedings of 57th ETRAN Conference, June 3-6, 2013, Zlatibor, Serbia. 2013;:MO3.1.1-MO3.1.6. https://hdl.handle.net/21.15107/rcub_cer_5814 .
Matić, Milan, Lazić, Žarko, Radulović, Katarina, Smiljanić, Milče M., Rašljić, Milena, "Eksperimentalno određivanje optimalne linearnosti senzora pritiska" in Zbornik 57. konferencije ETRAN, 3-6. jun 2013, Zlatibor / Proceedings of 57th ETRAN Conference, June 3-6, 2013, Zlatibor, Serbia (2013):MO3.1.1-MO3.1.6, https://hdl.handle.net/21.15107/rcub_cer_5814 .