Consideration of Thin Film Ionization Vacuum Pressure Sensor
Аутори
Bošković, MarkoRandjelović, Danijela
Rašljić, Milena
Cvetanović Zobenica, Katarina
Lazić, Žarko
Smiljanić, Milče M.
Sarajlić, Milija
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
A novel concept of vacuum pressure sensor based
on thin film technology is presented. The sensor is designed as
a 1 µm thick aluminium film patterned as a structure of
wedges facing each other along a sharp tip. The distance
between the wedge tips is 3 µm. This structure is obtained by
laser writing in vector mode. Parts of the sensor structure are
fabricated and measured. Analytical consideration of the
proposed structure is given together with the concept of the
experimental set up for testing of the sensor
Кључне речи:
Pressure sensor / DC discharge / Electrical conductivity of gasesИзвор:
Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia, 2019, 579-583Издавач:
- Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-MESTD-Technological Development (TD or TR)-32008)
Институција/група
IHTMTY - CONF AU - Bošković, Marko AU - Randjelović, Danijela AU - Rašljić, Milena AU - Cvetanović Zobenica, Katarina AU - Lazić, Žarko AU - Smiljanić, Milče M. AU - Sarajlić, Milija PY - 2019 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/5770 AB - A novel concept of vacuum pressure sensor based on thin film technology is presented. The sensor is designed as a 1 µm thick aluminium film patterned as a structure of wedges facing each other along a sharp tip. The distance between the wedge tips is 3 µm. This structure is obtained by laser writing in vector mode. Parts of the sensor structure are fabricated and measured. Analytical consideration of the proposed structure is given together with the concept of the experimental set up for testing of the sensor PB - Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering C3 - Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia T1 - Consideration of Thin Film Ionization Vacuum Pressure Sensor SP - 579 EP - 583 UR - https://hdl.handle.net/21.15107/rcub_cer_5770 ER -
@conference{ author = "Bošković, Marko and Randjelović, Danijela and Rašljić, Milena and Cvetanović Zobenica, Katarina and Lazić, Žarko and Smiljanić, Milče M. and Sarajlić, Milija", year = "2019", abstract = "A novel concept of vacuum pressure sensor based on thin film technology is presented. The sensor is designed as a 1 µm thick aluminium film patterned as a structure of wedges facing each other along a sharp tip. The distance between the wedge tips is 3 µm. This structure is obtained by laser writing in vector mode. Parts of the sensor structure are fabricated and measured. Analytical consideration of the proposed structure is given together with the concept of the experimental set up for testing of the sensor", publisher = "Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering", journal = "Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia", title = "Consideration of Thin Film Ionization Vacuum Pressure Sensor", pages = "579-583", url = "https://hdl.handle.net/21.15107/rcub_cer_5770" }
Bošković, M., Randjelović, D., Rašljić, M., Cvetanović Zobenica, K., Lazić, Ž., Smiljanić, M. M.,& Sarajlić, M.. (2019). Consideration of Thin Film Ionization Vacuum Pressure Sensor. in Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia Society for Electronics, Telecommunications, Computers, Automatic Control and Nuclear Engineering., 579-583. https://hdl.handle.net/21.15107/rcub_cer_5770
Bošković M, Randjelović D, Rašljić M, Cvetanović Zobenica K, Lazić Ž, Smiljanić MM, Sarajlić M. Consideration of Thin Film Ionization Vacuum Pressure Sensor. in Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia. 2019;:579-583. https://hdl.handle.net/21.15107/rcub_cer_5770 .
Bošković, Marko, Randjelović, Danijela, Rašljić, Milena, Cvetanović Zobenica, Katarina, Lazić, Žarko, Smiljanić, Milče M., Sarajlić, Milija, "Consideration of Thin Film Ionization Vacuum Pressure Sensor" in Proceedings - 6th International Conference on Electrical, Electronic and Computing Engineering, IcETRAN 2019, June 03 – 06, 2019, Silver Lake, Serbia (2019):579-583, https://hdl.handle.net/21.15107/rcub_cer_5770 .