Features furnace to review termocouples in CMTM laboratory
Karakteristike peći za pregled termoparova u CMTM laboratoriji
Abstract
The paper presents the testing and analysis of the characteristics of furnace which is previously used in the semiconductor industry. With the changes that have been analyzed, has become a part of the equipment to view thermocouples in the laboratory CMTM. Characteristics of steel block, which enable simultaneous measurements of more thermocouples to gain the necessary parameters of temperature in the right direction, are discussed.
U radu je prikazano ispitivanje i analiza karakteristika peći koja se ranije koristila u industriji poluprovodnika. Sa izmenama koje su analizirane u radu, postala je deo opreme za pregled termoparova u laboratoriji CMTM-a. Prikazane su karakteristike izotermskog čeličnog bloka kojim je omogućeno istovremeno merenje više termoparova i da se pri tome dobiju zahtevani parametri temperature u aksijalnom pravcu.
Keywords:
thermocouple / furnace / isothermal block / temperature measurement / measurement control / termopar / peć / izotermski blok / merenje temperature / kontrola merenjaSource:
Tehnika - Kvalitet, standardizacija i metrologija, 2009, 9, 4, 1-7Collections
Institution/Community
IHTMTY - JOUR AU - Vorkapić, Miloš AU - Popović, Bogdan AU - Tanasković, Dragan PY - 2009 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/555 AB - The paper presents the testing and analysis of the characteristics of furnace which is previously used in the semiconductor industry. With the changes that have been analyzed, has become a part of the equipment to view thermocouples in the laboratory CMTM. Characteristics of steel block, which enable simultaneous measurements of more thermocouples to gain the necessary parameters of temperature in the right direction, are discussed. AB - U radu je prikazano ispitivanje i analiza karakteristika peći koja se ranije koristila u industriji poluprovodnika. Sa izmenama koje su analizirane u radu, postala je deo opreme za pregled termoparova u laboratoriji CMTM-a. Prikazane su karakteristike izotermskog čeličnog bloka kojim je omogućeno istovremeno merenje više termoparova i da se pri tome dobiju zahtevani parametri temperature u aksijalnom pravcu. T2 - Tehnika - Kvalitet, standardizacija i metrologija T1 - Features furnace to review termocouples in CMTM laboratory T1 - Karakteristike peći za pregled termoparova u CMTM laboratoriji VL - 9 IS - 4 SP - 1 EP - 7 UR - https://hdl.handle.net/21.15107/rcub_cer_555 ER -
@article{ author = "Vorkapić, Miloš and Popović, Bogdan and Tanasković, Dragan", year = "2009", abstract = "The paper presents the testing and analysis of the characteristics of furnace which is previously used in the semiconductor industry. With the changes that have been analyzed, has become a part of the equipment to view thermocouples in the laboratory CMTM. Characteristics of steel block, which enable simultaneous measurements of more thermocouples to gain the necessary parameters of temperature in the right direction, are discussed., U radu je prikazano ispitivanje i analiza karakteristika peći koja se ranije koristila u industriji poluprovodnika. Sa izmenama koje su analizirane u radu, postala je deo opreme za pregled termoparova u laboratoriji CMTM-a. Prikazane su karakteristike izotermskog čeličnog bloka kojim je omogućeno istovremeno merenje više termoparova i da se pri tome dobiju zahtevani parametri temperature u aksijalnom pravcu.", journal = "Tehnika - Kvalitet, standardizacija i metrologija", title = "Features furnace to review termocouples in CMTM laboratory, Karakteristike peći za pregled termoparova u CMTM laboratoriji", volume = "9", number = "4", pages = "1-7", url = "https://hdl.handle.net/21.15107/rcub_cer_555" }
Vorkapić, M., Popović, B.,& Tanasković, D.. (2009). Features furnace to review termocouples in CMTM laboratory. in Tehnika - Kvalitet, standardizacija i metrologija, 9(4), 1-7. https://hdl.handle.net/21.15107/rcub_cer_555
Vorkapić M, Popović B, Tanasković D. Features furnace to review termocouples in CMTM laboratory. in Tehnika - Kvalitet, standardizacija i metrologija. 2009;9(4):1-7. https://hdl.handle.net/21.15107/rcub_cer_555 .
Vorkapić, Miloš, Popović, Bogdan, Tanasković, Dragan, "Features furnace to review termocouples in CMTM laboratory" in Tehnika - Kvalitet, standardizacija i metrologija, 9, no. 4 (2009):1-7, https://hdl.handle.net/21.15107/rcub_cer_555 .