Analytical modelling of thermopile based flow sensor and verification with experimental results
Само за регистроване кориснике
2009
Аутори
Randjelović, DanijelaĐurić, Zoran G.
Petropoulos, Anastasios
Kaltsas, Grigoris
Lazić, Žarko
Popović, Mirjana
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
A novel, simple approach for analytical modelling of thermal flow sensors has been implemented. It is based on unification of results obtained using the already developed two-zone analytical model and theory of laminar fluid flow over uniformly heated plate. This model can be used in order to extract the main parameters for various geometrical configurations of thermal flow sensors. Presented analytical model was further verified by experimental results. Flow tests were performed using multipurpose MEMS flow sensors consisting of two thermopiles, with 30 p(+)Si/Al thermocouples each, and a "U" shaped p(+)Si heater. Thermally isolating membrane was formed of sputtered SiO(2) and residual n-Si layer. Experimental evaluation was performed under various flow conditions and applied heating power values. The results showed excellent agreement with theoretical predictions.
Кључне речи:
MEMS / Flow sensor / Thermopile / Analytical modelling / Flow measurementsИзвор:
Microelectronic Engineering, 2009, 86, 4-6, 1293-1296Издавач:
- Elsevier
Финансирање / пројекти:
- Reinforcement of Regional Microsystems and Nanosystems Centre (EU-FP7-205533)
- Микросистемске, наносистемске технологије и компоненте (RS-MESTD-MPN2006-2010-11027)
DOI: 10.1016/j.mee.2008.12.004
ISSN: 0167-9317
WoS: 000267273300220
Scopus: 2-s2.0-67349268476
Институција/група
IHTMTY - JOUR AU - Randjelović, Danijela AU - Đurić, Zoran G. AU - Petropoulos, Anastasios AU - Kaltsas, Grigoris AU - Lazić, Žarko AU - Popović, Mirjana PY - 2009 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/536 AB - A novel, simple approach for analytical modelling of thermal flow sensors has been implemented. It is based on unification of results obtained using the already developed two-zone analytical model and theory of laminar fluid flow over uniformly heated plate. This model can be used in order to extract the main parameters for various geometrical configurations of thermal flow sensors. Presented analytical model was further verified by experimental results. Flow tests were performed using multipurpose MEMS flow sensors consisting of two thermopiles, with 30 p(+)Si/Al thermocouples each, and a "U" shaped p(+)Si heater. Thermally isolating membrane was formed of sputtered SiO(2) and residual n-Si layer. Experimental evaluation was performed under various flow conditions and applied heating power values. The results showed excellent agreement with theoretical predictions. PB - Elsevier T2 - Microelectronic Engineering T1 - Analytical modelling of thermopile based flow sensor and verification with experimental results VL - 86 IS - 4-6 SP - 1293 EP - 1296 DO - 10.1016/j.mee.2008.12.004 ER -
@article{ author = "Randjelović, Danijela and Đurić, Zoran G. and Petropoulos, Anastasios and Kaltsas, Grigoris and Lazić, Žarko and Popović, Mirjana", year = "2009", abstract = "A novel, simple approach for analytical modelling of thermal flow sensors has been implemented. It is based on unification of results obtained using the already developed two-zone analytical model and theory of laminar fluid flow over uniformly heated plate. This model can be used in order to extract the main parameters for various geometrical configurations of thermal flow sensors. Presented analytical model was further verified by experimental results. Flow tests were performed using multipurpose MEMS flow sensors consisting of two thermopiles, with 30 p(+)Si/Al thermocouples each, and a "U" shaped p(+)Si heater. Thermally isolating membrane was formed of sputtered SiO(2) and residual n-Si layer. Experimental evaluation was performed under various flow conditions and applied heating power values. The results showed excellent agreement with theoretical predictions.", publisher = "Elsevier", journal = "Microelectronic Engineering", title = "Analytical modelling of thermopile based flow sensor and verification with experimental results", volume = "86", number = "4-6", pages = "1293-1296", doi = "10.1016/j.mee.2008.12.004" }
Randjelović, D., Đurić, Z. G., Petropoulos, A., Kaltsas, G., Lazić, Ž.,& Popović, M.. (2009). Analytical modelling of thermopile based flow sensor and verification with experimental results. in Microelectronic Engineering Elsevier., 86(4-6), 1293-1296. https://doi.org/10.1016/j.mee.2008.12.004
Randjelović D, Đurić ZG, Petropoulos A, Kaltsas G, Lazić Ž, Popović M. Analytical modelling of thermopile based flow sensor and verification with experimental results. in Microelectronic Engineering. 2009;86(4-6):1293-1296. doi:10.1016/j.mee.2008.12.004 .
Randjelović, Danijela, Đurić, Zoran G., Petropoulos, Anastasios, Kaltsas, Grigoris, Lazić, Žarko, Popović, Mirjana, "Analytical modelling of thermopile based flow sensor and verification with experimental results" in Microelectronic Engineering, 86, no. 4-6 (2009):1293-1296, https://doi.org/10.1016/j.mee.2008.12.004 . .