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dc.creatorTodorović, D. M.
dc.creatorCretin, B.
dc.creatorSong, Y.Q.
dc.creatorSmiljanić, Milče
dc.creatorLazić, Žarko
dc.creatorRadulović, Katarina
dc.date.accessioned2019-01-30T17:18:53Z
dc.date.available2019-01-30T17:18:53Z
dc.date.issued2008
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/468
dc.description.abstractThe low-pressure sensors (IHTM-CMTM, SP-6) with square diaphragms and concentric bosses were investigated by the photothermal elastic vibration method. The photothermal vibrations were optically excited (the focused laser beam) in different diaphragms and the generated elastic vibrations were measured with a sensitive optical probe (the double-heterodyne interferometer). The photothermal vibration frequency spectra were measured and analyzed for different types of diaphragms with a different concentric boss and each type of diaphragms on the different technological level of production. This investigation is important for analysis of the influence of the different technological processes to the vibrations of the optically driven micromechanical structures, i.e. how the technological processes change the characteristics of sensors.en
dc.rightsrestrictedAccess
dc.source26th International Conference on Microelectronics, Proceedings, MIEL 2008
dc.titlePhotothermal vibration spectra of square diaphragm with boss for low-pressure sensoren
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractЛазић, Жарко; Сонг, Y.Q.; Тодоровић, Д. М.; Смиљанић, Милче; Цретин, Б.; Радуловић, Катарина;
dc.citation.spage325
dc.citation.epage328
dc.citation.other: 325-328
dc.identifier.doi10.1109/ICMEL.2008.4559287
dc.identifier.rcubConv_4084
dc.identifier.scopus2-s2.0-51749108877
dc.identifier.wos000257432600066
dc.type.versionpublishedVersion


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