Surface resistivity estimation by scanning surface potential microscopy
Apstrakt
Nickel was sputter deposited on a glass with a thin film thickness of 600 nm under either in an argon atmosphere or under a partial pressure of nitrogen of either 1.3× 10-4 or 4× 10-4 mbar. Atomic force microscopy and scanning surface potential microscopy (SSPM) were used to study the morphology and to estimate the surface resistivity of the obtained Ni thin films taking into account surface-roughness effects. For the three samples investigated, the surface resistivity values as estimated using SSPM were in good agreement with the results obtained by standard four-point probe measurements.
Izvor:
Review of Scientific Instruments, 2008, 79, 6Izdavač:
- AIP Publishing
Finansiranje / projekti:
- Dobijanje i karakterizacija površina nanostrukturnih materijala (RS-MESTD-MPN2006-2010-141001)
DOI: 10.1063/1.2937647
ISSN: 0034-6748
WoS: 000257283700048
Scopus: 2-s2.0-46449112477
Institucija/grupa
IHTMTY - JOUR AU - Rakočević, Zlatko Lj. AU - Popović, N. AU - Bogdanov, Žarko D. AU - Goncic, B. AU - Štrbac, Svetlana PY - 2008 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/447 AB - Nickel was sputter deposited on a glass with a thin film thickness of 600 nm under either in an argon atmosphere or under a partial pressure of nitrogen of either 1.3× 10-4 or 4× 10-4 mbar. Atomic force microscopy and scanning surface potential microscopy (SSPM) were used to study the morphology and to estimate the surface resistivity of the obtained Ni thin films taking into account surface-roughness effects. For the three samples investigated, the surface resistivity values as estimated using SSPM were in good agreement with the results obtained by standard four-point probe measurements. PB - AIP Publishing T2 - Review of Scientific Instruments T1 - Surface resistivity estimation by scanning surface potential microscopy VL - 79 IS - 6 DO - 10.1063/1.2937647 ER -
@article{ author = "Rakočević, Zlatko Lj. and Popović, N. and Bogdanov, Žarko D. and Goncic, B. and Štrbac, Svetlana", year = "2008", abstract = "Nickel was sputter deposited on a glass with a thin film thickness of 600 nm under either in an argon atmosphere or under a partial pressure of nitrogen of either 1.3× 10-4 or 4× 10-4 mbar. Atomic force microscopy and scanning surface potential microscopy (SSPM) were used to study the morphology and to estimate the surface resistivity of the obtained Ni thin films taking into account surface-roughness effects. For the three samples investigated, the surface resistivity values as estimated using SSPM were in good agreement with the results obtained by standard four-point probe measurements.", publisher = "AIP Publishing", journal = "Review of Scientific Instruments", title = "Surface resistivity estimation by scanning surface potential microscopy", volume = "79", number = "6", doi = "10.1063/1.2937647" }
Rakočević, Z. Lj., Popović, N., Bogdanov, Ž. D., Goncic, B.,& Štrbac, S.. (2008). Surface resistivity estimation by scanning surface potential microscopy. in Review of Scientific Instruments AIP Publishing., 79(6). https://doi.org/10.1063/1.2937647
Rakočević ZL, Popović N, Bogdanov ŽD, Goncic B, Štrbac S. Surface resistivity estimation by scanning surface potential microscopy. in Review of Scientific Instruments. 2008;79(6). doi:10.1063/1.2937647 .
Rakočević, Zlatko Lj., Popović, N., Bogdanov, Žarko D., Goncic, B., Štrbac, Svetlana, "Surface resistivity estimation by scanning surface potential microscopy" in Review of Scientific Instruments, 79, no. 6 (2008), https://doi.org/10.1063/1.2937647 . .