Optimization of micro/nanooscillator parameters for analysis of transient adsorption processes
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We consider optimization of parameters of micro/nanooscillators intended for investigation of adsorptiondesorption (AD) processes, which are fast in comparison with the response rate of the oscillator itself. We consider the choice of the values of the Q-factor, the resonant frequency of the micro/nanocantilever and the excitation frequency, in order to ensure that experimentally obtained micro/nanooscillator tirne response can be used for extraction of information about the AD process parameters. It is shown that a very small cantilever, which has a very high resonant frequency, can be used for investigation of AD processes whose time constant is as short as 10(-5) s.
Izvor:26th International Conference on Microelectronics, Vols 1 and 2, Proceedings, 2008, 359-362
- Institute of Electrical and Electronics Engineers Inc.