Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
Abstract
This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.
Source:
26th International Conference on Microelectronics, Vols 1 and 2, Proceedings, 2008, 367-370Publisher:
- Institute of Electrical and Electronics Engineers Inc.
DOI: 10.1109/ICMEL.2008.4559298
ISSN: 2159-1660
WoS: 000257432600076
Scopus: 2-s2.0-51749124672
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Institution/Community
IHTMTY - CONF AU - Randjelović, Danijela AU - Jovanov, Vladislav AU - Lazić, Žarko AU - Đurić, Zoran G. AU - Matic, A. PY - 2008 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/381 AB - This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions. PB - Institute of Electrical and Electronics Engineers Inc. C3 - 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings T1 - Vacuum MEMS sensor based on thermopiles - Simple model and experimental results SP - 367 EP - 370 DO - 10.1109/ICMEL.2008.4559298 ER -
@conference{ author = "Randjelović, Danijela and Jovanov, Vladislav and Lazić, Žarko and Đurić, Zoran G. and Matic, A.", year = "2008", abstract = "This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer p(+)Si/Al thermocouples and p(+)Si or Al heater. Thermal isolating membrane has sandwich structure consisting of sputtered SiO2 and residual n-Si layer. Dependence of output thermopile voltage on pressure was measured for sensors with different membrane thickness. Tests were performed in pressure range (10(-3)-10(5)) Pa. Experimental results were compared with theoretical predictions.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "26th International Conference on Microelectronics, Vols 1 and 2, Proceedings", title = "Vacuum MEMS sensor based on thermopiles - Simple model and experimental results", pages = "367-370", doi = "10.1109/ICMEL.2008.4559298" }
Randjelović, D., Jovanov, V., Lazić, Ž., Đurić, Z. G.,& Matic, A.. (2008). Vacuum MEMS sensor based on thermopiles - Simple model and experimental results. in 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings Institute of Electrical and Electronics Engineers Inc.., 367-370. https://doi.org/10.1109/ICMEL.2008.4559298
Randjelović D, Jovanov V, Lazić Ž, Đurić ZG, Matic A. Vacuum MEMS sensor based on thermopiles - Simple model and experimental results. in 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings. 2008;:367-370. doi:10.1109/ICMEL.2008.4559298 .
Randjelović, Danijela, Jovanov, Vladislav, Lazić, Žarko, Đurić, Zoran G., Matic, A., "Vacuum MEMS sensor based on thermopiles - Simple model and experimental results" in 26th International Conference on Microelectronics, Vols 1 and 2, Proceedings (2008):367-370, https://doi.org/10.1109/ICMEL.2008.4559298 . .