Towards Portable Thermal Vacuum Sensor-Consideration of Electrical Building Blocks and Compact Housing
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Multipurpose ICTM thermopile-based MEMS sensors have been successfully demonstrated as gas flow sensor, vacuum sensor, thermal converter and gas type sensor. Apart from further improvement of the sensor's design and performances, one direction of research is working towards realization of portable thermal devices. The aim of this paper is to present preliminary considerations of electrical building blocks and compact housing neccessary to realize a portable thermal vacuum device.
Keywords:Thermal sensors / Micromechanical devices / Heating systems / Wireless communication / Performance evaluation / Micorelectronics / Temperature measuments
Source:2019 IEEE 31st International Conference on Microelectronics, MIEL 2019 - Proceedings, 2019, 317-320
- Institute of Electrical and Electronics Engineers (IEEE)