Adsorbed mass fluctuations of a micro/nanoresonator surrounded by an arbitrary gas mixture
Само за регистроване кориснике
2006
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Micro/nanoresonator mass and frequency fluctuations caused by sorption processes on a resonator surface are investigated. Arbitrary gas mixture is considered. assuming that particle arrivals at the surface are all poissonian in nature. independent from each other, and that sorption dynamics follows the Langmuir isotherm. Power spectral density for mass fluctuations are derived using the analytical Langevin approach. The results of simulations are given for a silicon micro/nanocantilever in the atmosphere of four gases. The presented analysis is useful for calculation of the ultimate performance of MEMS/NEMS sensors and oscillators, as well as for investigation of the possibilities of their parameters optimization by choosing the gas mixture in the cantilever's atmosphere. Another objective is to consider the possibility of identification of gases in the mixture, based on the power spectral density of the adsorbed mass fluctuation.
Кључне речи:
cantilevers / gas mixtures / isothermal transformations / Langmuir-Blodgett films / micromechanical resonators / microsensors / sorption / Micromechanical devices / Nanoelectromechanical systems / Gas detectorsИзвор:
25th International Conference on Microelectronics, MIEL 2006 - Proceedings, 2006, 103-Издавач:
- Institute of Electrical and Electronics Engineers Inc.
Финансирање / пројекти:
- Serbian Ministry of Science
- TR6151 - Micro and Nanosystem Technologies, Structures and Sensors
DOI: 10.1109/ICMEL.2006.1650904
ISBN: 1-4244-0117-8
ISSN: 2159-1660
WoS: 000238839700015
Scopus: 2-s2.0-77956511905
Институција/група
IHTMTY - CONF AU - Đurić, Zoran G. AU - Jakšić, Olga AU - Jokić, Ivana AU - Frantlović, Miloš PY - 2006 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/253 AB - Micro/nanoresonator mass and frequency fluctuations caused by sorption processes on a resonator surface are investigated. Arbitrary gas mixture is considered. assuming that particle arrivals at the surface are all poissonian in nature. independent from each other, and that sorption dynamics follows the Langmuir isotherm. Power spectral density for mass fluctuations are derived using the analytical Langevin approach. The results of simulations are given for a silicon micro/nanocantilever in the atmosphere of four gases. The presented analysis is useful for calculation of the ultimate performance of MEMS/NEMS sensors and oscillators, as well as for investigation of the possibilities of their parameters optimization by choosing the gas mixture in the cantilever's atmosphere. Another objective is to consider the possibility of identification of gases in the mixture, based on the power spectral density of the adsorbed mass fluctuation. PB - Institute of Electrical and Electronics Engineers Inc. C3 - 25th International Conference on Microelectronics, MIEL 2006 - Proceedings T1 - Adsorbed mass fluctuations of a micro/nanoresonator surrounded by an arbitrary gas mixture SP - 103 DO - 10.1109/ICMEL.2006.1650904 ER -
@conference{ author = "Đurić, Zoran G. and Jakšić, Olga and Jokić, Ivana and Frantlović, Miloš", year = "2006", abstract = "Micro/nanoresonator mass and frequency fluctuations caused by sorption processes on a resonator surface are investigated. Arbitrary gas mixture is considered. assuming that particle arrivals at the surface are all poissonian in nature. independent from each other, and that sorption dynamics follows the Langmuir isotherm. Power spectral density for mass fluctuations are derived using the analytical Langevin approach. The results of simulations are given for a silicon micro/nanocantilever in the atmosphere of four gases. The presented analysis is useful for calculation of the ultimate performance of MEMS/NEMS sensors and oscillators, as well as for investigation of the possibilities of their parameters optimization by choosing the gas mixture in the cantilever's atmosphere. Another objective is to consider the possibility of identification of gases in the mixture, based on the power spectral density of the adsorbed mass fluctuation.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "25th International Conference on Microelectronics, MIEL 2006 - Proceedings", title = "Adsorbed mass fluctuations of a micro/nanoresonator surrounded by an arbitrary gas mixture", pages = "103", doi = "10.1109/ICMEL.2006.1650904" }
Đurić, Z. G., Jakšić, O., Jokić, I.,& Frantlović, M.. (2006). Adsorbed mass fluctuations of a micro/nanoresonator surrounded by an arbitrary gas mixture. in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings Institute of Electrical and Electronics Engineers Inc.., 103. https://doi.org/10.1109/ICMEL.2006.1650904
Đurić ZG, Jakšić O, Jokić I, Frantlović M. Adsorbed mass fluctuations of a micro/nanoresonator surrounded by an arbitrary gas mixture. in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings. 2006;:103. doi:10.1109/ICMEL.2006.1650904 .
Đurić, Zoran G., Jakšić, Olga, Jokić, Ivana, Frantlović, Miloš, "Adsorbed mass fluctuations of a micro/nanoresonator surrounded by an arbitrary gas mixture" in 25th International Conference on Microelectronics, MIEL 2006 - Proceedings (2006):103, https://doi.org/10.1109/ICMEL.2006.1650904 . .