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dc.creatorRandjelović, Danijela
dc.date.accessioned2019-01-30T17:59:38Z
dc.date.available2019-01-30T17:59:38Z
dc.date.issued2018
dc.identifier.urihttps://cer.ihtm.bg.ac.rs/handle/123456789/2396
dc.description.abstractThis work demonstrates how binary gas mixture composition and pressure can be simultaneously determined based on the value of thermal time constant of thermopile-based MEMS sensor. Self-developed analytical model for transient analysis is applied initially to define optimal design of the thermal sensor in terms of the residual n-Si thickness and the number of thermocouples. Procedure for detection of gas mixture composition and pressure was implemented on thermal sensor placed in binary gas mixtures used as shielding gases in industrial processes of welding, cutting and melting of metals.en
dc.publisherInstitute of Electrical and Electronics Engineers Inc.
dc.relationinfo:eu-repo/grantAgreement/MESTD/Technological Development (TD or TR)/32008/RS//
dc.rightsrestrictedAccess
dc.sourceProceedings of the International Semiconductor Conference, CAS
dc.subjectAnalytical modelen
dc.subjectGas sensoren
dc.subjectThermal time constanten
dc.subjectThermopileen
dc.titleAnalytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Compositionen
dc.typeconferenceObject
dc.rights.licenseARR
dcterms.abstractРанђеловић, Данијела;
dc.citation.spage27
dc.citation.epage34
dc.citation.other: 27-34
dc.identifier.doi10.1109/SMICND.2018.8539826
dc.identifier.scopus2-s2.0-85059641787
dc.type.versionpublishedVersion


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