Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition
Само за регистроване кориснике
2018
Конференцијски прилог (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
This work demonstrates how binary gas mixture composition and pressure can be simultaneously determined based on the value of thermal time constant of thermopile-based MEMS sensor. Self-developed analytical model for transient analysis is applied initially to define optimal design of the thermal sensor in terms of the residual n-Si thickness and the number of thermocouples. Procedure for detection of gas mixture composition and pressure was implemented on thermal sensor placed in binary gas mixtures used as shielding gases in industrial processes of welding, cutting and melting of metals.
Кључне речи:
Analytical model / Gas sensor / Thermal time constant / ThermopileИзвор:
Proceedings of the International Semiconductor Conference, CAS, 2018, 27-34Издавач:
- Institute of Electrical and Electronics Engineers Inc.
Финансирање / пројекти:
- Микро, нано-системи и сензори за примену у електропривреди, процесној индустрији и заштити животне средине (RS-MESTD-Technological Development (TD or TR)-32008)
Институција/група
IHTMTY - CONF AU - Randjelović, Danijela PY - 2018 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/2396 AB - This work demonstrates how binary gas mixture composition and pressure can be simultaneously determined based on the value of thermal time constant of thermopile-based MEMS sensor. Self-developed analytical model for transient analysis is applied initially to define optimal design of the thermal sensor in terms of the residual n-Si thickness and the number of thermocouples. Procedure for detection of gas mixture composition and pressure was implemented on thermal sensor placed in binary gas mixtures used as shielding gases in industrial processes of welding, cutting and melting of metals. PB - Institute of Electrical and Electronics Engineers Inc. C3 - Proceedings of the International Semiconductor Conference, CAS T1 - Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition SP - 27 EP - 34 DO - 10.1109/SMICND.2018.8539826 ER -
@conference{ author = "Randjelović, Danijela", year = "2018", abstract = "This work demonstrates how binary gas mixture composition and pressure can be simultaneously determined based on the value of thermal time constant of thermopile-based MEMS sensor. Self-developed analytical model for transient analysis is applied initially to define optimal design of the thermal sensor in terms of the residual n-Si thickness and the number of thermocouples. Procedure for detection of gas mixture composition and pressure was implemented on thermal sensor placed in binary gas mixtures used as shielding gases in industrial processes of welding, cutting and melting of metals.", publisher = "Institute of Electrical and Electronics Engineers Inc.", journal = "Proceedings of the International Semiconductor Conference, CAS", title = "Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition", pages = "27-34", doi = "10.1109/SMICND.2018.8539826" }
Randjelović, D.. (2018). Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition. in Proceedings of the International Semiconductor Conference, CAS Institute of Electrical and Electronics Engineers Inc.., 27-34. https://doi.org/10.1109/SMICND.2018.8539826
Randjelović D. Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition. in Proceedings of the International Semiconductor Conference, CAS. 2018;:27-34. doi:10.1109/SMICND.2018.8539826 .
Randjelović, Danijela, "Analytical Modelling Approach in Study of the Transient Response of Thermopile-Based MEMS Sensors Applied for Simultaneous Detection of Pressure and Gas Composition" in Proceedings of the International Semiconductor Conference, CAS (2018):27-34, https://doi.org/10.1109/SMICND.2018.8539826 . .