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dc.creatorZlatar, Matija
dc.creatorAllan, Michael
dc.creatorFedor, Juraj
dc.date.accessioned2019-01-30T17:51:48Z
dc.date.available2019-01-30T17:51:48Z
dc.date.issued2016
dc.identifier.issn1932-7447
dc.identifier.urihttp://cer.ihtm.bg.ac.rs/handle/123456789/2022
dc.description.abstractElectron induced chemistry of metal-containing precursor molecules is central in focused electron beam induced deposition (FEBID). While some elementary processes leading to precursor decomposition were quantitatively characterized, data for neutral dissociation is missing. We provide this data for the model precursor Pt(PF3)(4) by using the available cross sections for electronic excitation and characterizing fragmentation of the excited states theoretically by TDDFT. The potential energy curves for a number of states visible in the experimental electron energy loss spectra are dissociative, either directly or via conical intersections, indicating that the quantum yield for dissociation is close to 100%. Taking into account typical electron energy distribution at the FEBID spot reveals that the importance of neutral dissociation exceeds that of dissociative electron attachment, which has been so far considered to be the dominant decomposition process. We thus established neutral dissociation as an important, albeit often neglected, channel for FEBID using Pt(PF3)(4). The calculations revealed a number of other phenomena that can play a role in electron induced chemistry of this compound, e.g., a considerable increase of bond dissociation energy with sequential removal of multiple ligands.en
dc.publisherAmer Chemical Soc, Washington
dc.relationinfo:eu-repo/grantAgreement/MESTD/Basic Research (BR or ON)/172035/RS//
dc.relationSwiss National Science Foundation - 200020-144367/1
dc.relationCOST action - CM1301 CELINA
dc.rightsrestrictedAccess
dc.sourceJournal of Physical Chemistry C
dc.titleExcited States of Pt(PF3)(4) and Their Role in Focused Electron Beam Nanofabricationen
dc.typearticle
dc.rights.licenseARR
dcterms.abstractAллан, Мицхаел; Златар, Матија; Федор, Јурај;
dc.citation.volume120
dc.citation.issue19
dc.citation.spage10667
dc.citation.epage10674
dc.citation.other120(19): 10667-10674
dc.citation.rankM21
dc.identifier.doi10.1021/acs.jpcc.6b02660
dc.identifier.rcubConv_3544
dc.identifier.scopus2-s2.0-84971318229
dc.identifier.wos000376417500060
dc.type.versionpublishedVersion


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