Excited States of Pt(PF3)(4) and Their Role in Focused Electron Beam Nanofabrication
Само за регистроване кориснике
2016
Чланак у часопису (Објављена верзија)
Метаподаци
Приказ свих података о документуАпстракт
Electron induced chemistry of metal-containing precursor molecules is central in focused electron beam induced deposition (FEBID). While some elementary processes leading to precursor decomposition were quantitatively characterized, data for neutral dissociation is missing. We provide this data for the model precursor Pt(PF3)(4) by using the available cross sections for electronic excitation and characterizing fragmentation of the excited states theoretically by TDDFT. The potential energy curves for a number of states visible in the experimental electron energy loss spectra are dissociative, either directly or via conical intersections, indicating that the quantum yield for dissociation is close to 100%. Taking into account typical electron energy distribution at the FEBID spot reveals that the importance of neutral dissociation exceeds that of dissociative electron attachment, which has been so far considered to be the dominant decomposition process. We thus established neutral disso...ciation as an important, albeit often neglected, channel for FEBID using Pt(PF3)(4). The calculations revealed a number of other phenomena that can play a role in electron induced chemistry of this compound, e.g., a considerable increase of bond dissociation energy with sequential removal of multiple ligands.
Извор:
Journal of Physical Chemistry C, 2016, 120, 19, 10667-10674Издавач:
- American Chemical Society (ACS)
Финансирање / пројекти:
- Рационални дизајн и синтеза биолошки активних и координационих једињења и функционалних материјала, релевантних у (био)нанотехнологији (RS-MESTD-Basic Research (BR or ON)-172035)
- Swiss National Science Foundation - 200020-144367/1
- COST action - CM1301 CELINA
Напомена:
- Supplementary information: https://cer.ihtm.bg.ac.rs/handle/123456789/4464
DOI: 10.1021/acs.jpcc.6b02660
ISSN: 1932-7447
WoS: 000376417500060
Scopus: 2-s2.0-84971318229
Институција/група
IHTMTY - JOUR AU - Zlatar, Matija AU - Allan, Michael AU - Fedor, Juraj PY - 2016 UR - https://cer.ihtm.bg.ac.rs/handle/123456789/2022 AB - Electron induced chemistry of metal-containing precursor molecules is central in focused electron beam induced deposition (FEBID). While some elementary processes leading to precursor decomposition were quantitatively characterized, data for neutral dissociation is missing. We provide this data for the model precursor Pt(PF3)(4) by using the available cross sections for electronic excitation and characterizing fragmentation of the excited states theoretically by TDDFT. The potential energy curves for a number of states visible in the experimental electron energy loss spectra are dissociative, either directly or via conical intersections, indicating that the quantum yield for dissociation is close to 100%. Taking into account typical electron energy distribution at the FEBID spot reveals that the importance of neutral dissociation exceeds that of dissociative electron attachment, which has been so far considered to be the dominant decomposition process. We thus established neutral dissociation as an important, albeit often neglected, channel for FEBID using Pt(PF3)(4). The calculations revealed a number of other phenomena that can play a role in electron induced chemistry of this compound, e.g., a considerable increase of bond dissociation energy with sequential removal of multiple ligands. PB - American Chemical Society (ACS) T2 - Journal of Physical Chemistry C T1 - Excited States of Pt(PF3)(4) and Their Role in Focused Electron Beam Nanofabrication VL - 120 IS - 19 SP - 10667 EP - 10674 DO - 10.1021/acs.jpcc.6b02660 ER -
@article{ author = "Zlatar, Matija and Allan, Michael and Fedor, Juraj", year = "2016", abstract = "Electron induced chemistry of metal-containing precursor molecules is central in focused electron beam induced deposition (FEBID). While some elementary processes leading to precursor decomposition were quantitatively characterized, data for neutral dissociation is missing. We provide this data for the model precursor Pt(PF3)(4) by using the available cross sections for electronic excitation and characterizing fragmentation of the excited states theoretically by TDDFT. The potential energy curves for a number of states visible in the experimental electron energy loss spectra are dissociative, either directly or via conical intersections, indicating that the quantum yield for dissociation is close to 100%. Taking into account typical electron energy distribution at the FEBID spot reveals that the importance of neutral dissociation exceeds that of dissociative electron attachment, which has been so far considered to be the dominant decomposition process. We thus established neutral dissociation as an important, albeit often neglected, channel for FEBID using Pt(PF3)(4). The calculations revealed a number of other phenomena that can play a role in electron induced chemistry of this compound, e.g., a considerable increase of bond dissociation energy with sequential removal of multiple ligands.", publisher = "American Chemical Society (ACS)", journal = "Journal of Physical Chemistry C", title = "Excited States of Pt(PF3)(4) and Their Role in Focused Electron Beam Nanofabrication", volume = "120", number = "19", pages = "10667-10674", doi = "10.1021/acs.jpcc.6b02660" }
Zlatar, M., Allan, M.,& Fedor, J.. (2016). Excited States of Pt(PF3)(4) and Their Role in Focused Electron Beam Nanofabrication. in Journal of Physical Chemistry C American Chemical Society (ACS)., 120(19), 10667-10674. https://doi.org/10.1021/acs.jpcc.6b02660
Zlatar M, Allan M, Fedor J. Excited States of Pt(PF3)(4) and Their Role in Focused Electron Beam Nanofabrication. in Journal of Physical Chemistry C. 2016;120(19):10667-10674. doi:10.1021/acs.jpcc.6b02660 .
Zlatar, Matija, Allan, Michael, Fedor, Juraj, "Excited States of Pt(PF3)(4) and Their Role in Focused Electron Beam Nanofabrication" in Journal of Physical Chemistry C, 120, no. 19 (2016):10667-10674, https://doi.org/10.1021/acs.jpcc.6b02660 . .