Search
Now showing items 1-10 of 14
RF MEMS and NEMS Components and Adsorption-Desorption Induced Phase Noise
(Institute of Electrical and Electronics Engineers Inc., 2014)
Radio frequency micro- and nanoelectromechanical systems (RF MEMS and RF NEMS) and technologies have a great potential to overcome the constraints of conventional IC technologies in realization of fully integrated transceivers ...
Numerical Simulation of Transient Response of Chemical and Biological Micro/Nanofabricated Sensors Operating in Multianalyte Environments
(Institute of Electrical and Electronics Engineers Inc., 2014)
In different kinds of surface-based chemical and biological micro/nanosensors, interpretation of the experimentally obtained data is performed based on approximate solutions for the sensor response, valid for the case of ...
Vacuum Sensing Based on the Influence of Gas Pressure on Thermal Time Constant
(Institute of Electrical and Electronics Engineers Inc., 2014)
In this paper we propose a novel operating principle for thermal vacuum sensor. The sensor considered in this work consists of thermopiles and thermally isolating membrane structure. The operating principle of such sensor ...
Lagergren Kinetic Model and Multianalyte Detection by Plasmonic Sensors
(Institute of Electrical and Electronics Engineers Inc., 2014)
This work is dedicated to modeling of adsorption processes in plasmonic sensors. We give a generalization of the Lagergren first order reaction kinetic model to the situations where adsorption takes place in multianalyte ...
Highly sensitive graphene-based chemical and biological sensors with selectivity achievable through low-frequency noise measurement-Theoretical considerations
(Institute of Electrical and Electronics Engineers Inc., 2014)
We have developed a theory of the low-frequency noise caused by interaction of the analyte with the active area of chemical and biological sensors. The main result is an analytical expression for the spectral density of ...
Plasmonic Metamaterial with Fishnet Superlattice for Enhanced Chemical Sensing
(Institute of Electrical and Electronics Engineers Inc., 2014)
In this work we consider a novel type of superlattice fishnet metamaterial for chemical sensing. By superimposing two fishnet metamaterial lattices we aim to achieve increased functionality compared to the standard fishnet ...
Glass Micromachining with Sputtered Silicon as a Masking Layer
(Institute of Electrical and Electronics Engineers Inc., 2014)
In this work we present the not so commonly use of RF sputtered silicon as a masking layer for glass wet etching. The main advantages of this technique are low deposition temperature of silicon layer compared to PECVD and ...
Temperature Measurement Using Silicon Piezoresistive MEMS Pressure Sensors
(Institute of Electrical and Electronics Engineers Inc., 2014)
In industrial processes, as well as in many other fields from vehicles to healthcare, temperature and pressure are the most common parameters to be measured and monitored. Silicon microelectromechanical (MEMS) piezoresistive ...
Tailorable Effective Optical Response of Dual-metal Plasmonic Crystals
(Institute of Electrical and Electronics Engineers Inc., 2017)
The main problems with plasmonics for devices are connected with its very nature implying the need to use free electron conductors, mostly good metals like silver or gold. The choice of natural materials and thus their ...
Prevention of Convex Corner Undercutting in Fabrication of Silicon Microcantilevers by Wet Anisotropic Etching
(Institute of Electrical and Electronics Engineers Inc., 2014)
This paper presents microcantilever fabrication on {100} oriented Si substrate using bulk micromachining technique. Detailed characteristics of convex corner compensation design for {100} oriented beam for two etching ...