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Investigation of silicon anisotropic etching in alkaline solutions with propanol addition
(Institute of Electrical and Electronics Engineers Inc., 2008)
Different propanol isomers additives to 26 wt. % KOH water solution have been studied. It was stated that addition of both isomers result in changing etching anisotropy of (110) oriented corners on Si LT 100 >. For the ...
Fabrication and characterization of AFM golden microcantilevers and measurement of small electromagnetic forces
(Institute of Electrical and Electronics Engineers Inc., 2008)
This paper presents results of research oriented towards developing a method for measurement of small electromagnetic forces using atomic force microscope (AFM). The method is based on the measurement of cantilever deflection ...
Optimization of micro/nanooscillator parameters for analysis of transient adsorption processes
(Institute of Electrical and Electronics Engineers Inc., 2008)
We consider optimization of parameters of micro/nanooscillators intended for investigation of adsorptiondesorption (AD) processes, which are fast in comparison with the response rate of the oscillator itself. We consider ...
A consideration of optical noise figures of adsorption-based nanophotonic sensors
(Institute of Electrical and Electronics Engineers Inc., 2008)
We consider some intrinsic noise mechanisms appearing in nanophotonic sensors based on plasmonic structures and surface plasmon-polaritons. We analyze the photonic Johnson-Nyquist fluctuations and the adsorption and ...
Non-contact measurement of thickness uniformity of chemically etched Si membranes by fiber-optic low-coherence interferometry
(Institute of Electrical and Electronics Engineers Inc., 2008)
In this paper we present a contactless technique for thickness measurement of chemically etched Si membranes. This technique is based on low-coherence interferometry performed by single-mode fiber-optic sensing configuration. ...
Metal-dielectric photonic crystal for the enhancement of solar-blind ultraviolet silicon photodiodes
(Institute of Electrical and Electronics Engineers Inc., 2008)
We report the fabrication of metal-dielectric photonic crystals as bandpass filter for the UV riadiation with a sidelobe suppression in excess of 4 orders of magnitude. The metal-dielectrics were designed for the enhcancement ...
Metal nanowire arrays with ultralow or negative effective permittivity for adsorption-based chemical sensing
(Institute of Electrical and Electronics Engineers Inc., 2008)
We investigated wire-mesh media with plasma-like dispersion of dielectric permittivity as a potential medium for nanoplasmonic sensors utilizing adsorption of chemical, biochemical or biological analytes. Such structures ...
Sputtered nickel coverage of the SiO2 nano-step
(Institute of Electrical and Electronics Engineers Inc., 2008)
In this paper we give a survey of the problems that we encountered during deposition and examination of the Ni layers on SiO2 nano-step. We made nano-layer Of SiO2 and deposited Ni film on top of it thus making particular ...
Vacuum MEMS sensor based on thermopiles - Simple model and experimental results
(Institute of Electrical and Electronics Engineers Inc., 2008)
This paper presents a simple model of MEMS thermopile based vacuum detector and experimental results obtained for sensors designed and fabricated at IHTM-IMTM. Sensors contain two thermopiles, each with 30 multilayer ...